Silicon Carbide Cantilevers Paddle
Samfurin cikakken bayani da aikace-aikace
Babban wafer loading Force silicon carbide SiSiC / SiC cantilever paddle / katako ya dace da robot atomatik loading da kuma rike tsarin saboda yana da barga yi, ba-nakasawa a cikin zazzabi mai girma da kuma manyan wafer loading ƙarfi. Tunda ɓangaren katakon filayen cantilever ya daidaita ba tare da wata nakasa ba, yana yiwuwa a sanya wafer mafi girma ta amfani da tubun wutar makera. Ana iya amfani da babban wafer na yin amfani da sibin silsilar SiSiC / SiC cantilever paddle / katako zuwa LPVCD bisa kwatankwacin haɓakar haɓakar zafin jikinsa tare da murfin LPVCD, wanda ke daɗa tsawan matakan kulawa da tsaftacewa, da kuma rage gurɓatattun abubuwa.
Sigogin fasaha na halayen haɗin siliki na siliki RBSIC:
abu | naúrar | bayanai |
Zazzabi na aikace-aikace | ℃ | 1380 |
yawa | G / cm3 | > = 3.02 |
Bude porosity | % | <0.1 |
Matsayin Hardarfin Moh | 13 | |
Lanƙwasa ƙarfi | Mpa | 250 (20 ℃) |
Mpa | 280 (1200 ℃) | |
Yanayin elasticity | Gpa | 330 (20 ℃) |
Gpa | 300 (1200 ℃) | |
Yanayin zafi | W / mk | 45 (1200 ℃) |
Coefficient na thermal fadada | K-1 * 10-6 | 4.5 |
Acid-proof alkaline | Madalla |
Fasali:
a. Ba ya canzawa a yanayin zafi mai zafi kuma karfin wafer yana da girma;
b. Kyakkyawan juriya mai saurin zafi da tsawon rayuwa;
c. Expansionarfin haɓakar zafin kwalliyar kwalliyar cantilever ƙananan ƙarami ne, wanda ke ƙara tsawan aiki da tsaftacewa;
da kuma rage gurɓatattun abubuwa
Sauran kayan kwalliyar da aka yi da yumbu mai yalwar siliki
Bayan Reaction sintered silicon carbide SiSiC cantilever paddle don wafer loading, mun kuma samar da wasu kiln furniture ciki har da RBSIC / SISIC silicon carbide katako, bututun ƙarfe bututu, karkace bututun ƙarfe, swirl bututun ƙarfe bututu, oxide bonded SIC silicon carbide batts / setter plate da RBSIC sanyaya bututu .
Sanya kayan RBICIC / SISIC silicon carbide
Saboda samfurinmu na RBSIC / SISIC silicon carbide suna da fa'idodi na kyakkyawan juriya na lalacewa, juriya ta lalata da tsawon rayuwar sabis, ana kuma iya sanya shi cikin layin da zai iya jurewa wanda za'a iya sanya shi cikin sauƙin sarrafa bututu ko mahaukaciyar iska.